Fresnel zone plate telescope for condenser alignment in water-window microscope
PBN-AR
Instytucja
Instytut Optoelektroniki (Wojskowa Akademia Techniczna im. Jarosława Dąbrowskiego)
Informacje podstawowe
Główny język publikacji
en
Czasopismo
Journal of Optics
ISSN
2040-8978
EISSN
2040-8986
Wydawca
IOP PUBLISHING LTD
DOI
URL
Rok publikacji
2015
Numer zeszytu
5
Strony od-do
055606
Numer tomu
17
Identyfikator DOI
Liczba arkuszy
Słowa kluczowe
en
CCD cameras
Geometry
Imaging systems
Numerical methods
Sun
Telescopes
Visualization
X ray microscopes
X ray optics
Direct visualization
Extreme Ultraviolet
Fresnel zone plate
Gas puff targets
Illumination patterns
Modes of operation
Soft x rays
Spatial resolution
Plates (structural components)
Streszczenia
Język
en
Treść
Microscopes operating at short wavelengths, in the extreme ultraviolet and soft x-ray spectral region, require careful condenser positioning to avoid possible artifacts related to enhancing or diminishing certain spatial frequencies in the image plane. Various methods are often used to visualize the condenser illumination pattern, including direct visualization on a CCD camera; however, these are not always straightforward to use. We present and discuss a novel and convenient method to image a condenser illumination pattern upstream the sample plane, using two zone plates with matched numerical apertures. This imaging system, operating herein in the water-window spectral range in telescope configuration, allows us to change the distance between the conjugated planes, thus overcoming limitations related to the geometry of the vacuum system. This geometry, which is optimized for the highest possible spatial resolution allowed by the zone-plate objective, is not necessarily particularly good for visualization of the condenser illumination pattern. The presented method was demonstrated with a compact, gas puff target source based soft x-ray microscope, which is capable of resolving 60 nm features (half-pitch resolution), requires a few seconds exposure time, and is debris-free due to the gaseous nature of the target for soft x-ray generation. The method, presented herein, may solve mentioned vacuum system geometry limitations. Also, it can easily be extended to other systems and other wavelengths, provided a proper optic is used. Modes of operation and the results are presented and discussed. © 2015 IOP Publishing Ltd.
Cechy publikacji
Original article
Original article presents the results of original research or experiment.
Oryginalny artykuł naukowy
Oryginalny artykuł naukowy przedstawia rezultaty oryginalnych badań naukowych lub eksperymentu.
Inne
System-identifier
PBN-R:584646
CrossrefMetadata from Crossref logo
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