Combined reactive/non-reactive DC magnetron sputtering of high temperature composite AlN-TiB2-TiSi2
PBN-AR
Instytucja
Centrum Nanobiomedyczne (Uniwersytet im. Adama Mickiewicza w Poznaniu)
Informacje podstawowe
Główny język publikacji
en
Czasopismo
MATERIALS & DESIGN
ISSN
0261-3069
EISSN
Wydawca
ELSEVIER SCI LTD
DOI
URL
Rok publikacji
2016
Numer zeszytu
Strony od-do
230-239
Numer tomu
94
Link do pełnego tekstu
Identyfikator DOI
Liczba arkuszy
Słowa kluczowe
en
Hard coatings
Nanocomposite
Functionally graded film
Nanoindentation
Wear test
Streszczenia
Język
en
Treść
High temperature composite target AlN-TiB2-TiSi2 with heterogeneous distribution of compounds (AlN-50 wt.\%; TiB2-35 wt.\%; TiSi2-15 wt.\%) is used for sputtering via combined reactive/non-reactive DCmagnetron sputtering onto substrate materials either cylindrical polished steel (Fe, 18\%-Ni, 12\%-Cr, 10\%-Ti) 3mm diameter or monocrystalline silicon. The gradient coating has been produced by sequential non-reactive and reactive sputtering of the target. The structural and morphological properties of the deposited films are analyzed by transmission electron microscopy, scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. The tribo-mechanical properties are studied by means of nanoindentation and nanowear tests. The gradient film is composed of two layers with different microstructure and elemental composition. The first layer with thickness similar to 200 nm is mainly based on light B, C and N as well metal elements Al, Si and Ti. The presence of very well distributed nanocrystals embedded in an amorphous matrix, with crystal sizes ranging from 5 to 40 nm is observed in the second layer similar to 700 nm thickness and composed of Al, Ti, Si, B, and N. Films show very flat surfaces, with roughness around 0.35 nm. The hardness, elastic modulus, elastic recovery (W-e), H/E* ratio and H-3/E*(2) ratio are determined as 17.55 GPa, 216.7 GPa, 60\%, 0.08 and 0.12 GPa, respectively. Nanowear tests demonstrate relatively high wear resistance of the coatings. Samples show promising characteristics for hard protective adaptive coatings and diffusion barriers due to short propagation of dislocations in the amorphous matrix and the elastic and hard nature of the nanocomposite structure. (C) 2016 Elsevier Ltd. All rights reserved.
Cechy publikacji
Original article
Original article presents the results of original research or experiment.
Oryginalny artykuł naukowy
Oryginalny artykuł naukowy przedstawia rezultaty oryginalnych badań naukowych lub eksperymentu.
Inne
System-identifier
PBN-R:861757
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