Compositional, structural, and optical properties of atomic layer deposited tantalum oxide for optical fiber sensor overlays
PBN-AR
Instytucja
Instytut Fizyki Polskiej Akademii Nauk
Informacje podstawowe
Główny język publikacji
angielski
Czasopismo
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (30pkt w roku publikacji)
ISSN
0734-2101
EISSN
Wydawca
A V S AMER INST PHYSICS
DOI
URL
Rok publikacji
2018
Numer zeszytu
3
Strony od-do
031505
Numer tomu
36
Identyfikator DOI
Liczba arkuszy
Autorzy
(liczba autorów: 9)
Pozostali autorzy
+ 7
Słowa kluczowe
angielski
Rutherford backscattering
Fiber optic devices
X-ray diffractometers
Secondary ion mass spectroscopy
Optical metrology
Optical properties
Thin films
Graphene films
Open access
Tryb otwartego dostępu
Wersja tekstu w otwartym dostępie
Licencja otwartego dostępu
Czas opublikowania w otwartym dostępie
Data udostępnienia w sposób otwarty
Streszczenia
Język
angielski
Treść
Although Ta2O5 is thermodynamically the most stable form of TaxOy, the chemical composition/stoichiometry of TaxOy films may generally be complex. On the other hand, to be robust in harsh chemical environments, the film material is required to be amorphous rather than crystalline. The amorphousness of atomic layer deposited (ALD) films is promoted by low process temperature generally. This paper presents the study on TaxOy films deposited by ALD at low temperature (100 °C) using TaCl5 and H2O as chemical precursors, bringing the compositional, structural, and optical properties of the films together. The films with the thickness in the range of 32–202.5 nm were deposited mostly on Si (100) wafers. For their characterization, secondary ion mass spectroscopy, Rutherford backscattering spectroscopy, x-ray photoelectron spectroscopy, x-ray diffractometry, and spectroscopic ellipsometry were performed. The films were overstoichiometric in relation to Ta2O5, with the O/Ta ratio in the range of 2.7–2.8. Additionally, some amount of surface O was bound within adsorbed -OH and -CO groups. The main contaminant of the films was Cl (5–5.5 at. %). The main contaminant of their surfaces and at the film/substrate interfaces was carbon (>50 at. %). All the films proved to be fully amorphous. Their real part of refractive index was very similar (n approximately 2) in the whole range of thicknesses, with differences of a few percent only. Optical attenuation was negligibly low.
Język
Treść
Inne
System-identifier
PX-5b7bbe4cd5de6244fb5aeb82
CrossrefMetadata from Crossref logo
Cytowania
Liczba prac cytujących tę pracę
Brak danych
Referencje
Liczba prac cytowanych przez tę pracę
Brak danych